MEMS PEARSALL LECTURE: 3D Mesostructures and Their Applications in Unusual MEMS Technologies
Complex, three-dimensional (3D) micro/nanostructures in biology provide sophisticated, essential functions in even the most basic forms of life. Compelling opportunities exist for analogous 3D structures in man-made devices, but existing design options are highly constrained by comparatively primitive capabilities in fabrication and growth. Recent advances in mechanical engineering and materials science provide broad access to diverse, highly engineered classes of 3D architectures, with characteristic dimensions that range from nanometers to centimeters and areas that span square centimeters or more. The approach relies on geometric transformation of preformed two-dimensional (2D) precursor micro/nanostructures and/or devices into extended 3D layouts by controlled processes of substrate-induced compressive buckling, where the bonding configurations, thickness distributions and other parameters control the final configurations. This talk reviews the key concepts and focuses on the most recent developments with example applications in areas ranging from mesoscale microfluidic/electronic networks as advanced neural interfaces to bio-inspired microfliers as environmental sensing platforms.
Professor John A. Rogers obtained BA and BS degrees in chemistry and in physics from the University of Texas, Austin, in 1989. From MIT, he received SM degrees in physics and in chemistry in 1992 and the PhD degree in physical chemistry in 1995. From 1995 to 1997, Rogers was a Junior Fellow in the Harvard University Society of Fellows. He joined Bell Laboratories as a Member of Technical Staff and then served as Director of the Condensed Matter Physics Research Department from 1997 to 2002. He then spent thirteen years on the faculty at University of Illinois, most recently as the Swanlund Chair Professor and Director of the Seitz Materials Research Laboratory. In the Fall of 2016, he moved to Northwestern University where he is Director of the recently endowed Querrey-Simpson Institute for Bioelectronics. He has co-authored nearly 900 papers and his a co-inventor on more than 100 patents. His research has been recognized by many awards, including a MacArthur Fellowship (2009), the Lemelson-MIT Prize (2011), the Smithsonian Award for American Ingenuity in the Physical Sciences (2013), the Benjamin Franklin Medal from the Franklin Institute (2019), and a Guggenheim Fellowship (2021). He is a member of the National Academy of Engineering, the National Academy